Product Category menu

RPC Angle Valve

Product Thumnail Image Zoom

[Basic Infomation]
Trader

[INNORES. CO., LTD]

  • South Korea South Korea
  • KITA MEMBER
Add to My Interests Send Inquiry
Product Detail Information

Features

  • Particle Free
  • Vibration free
  • Micro Switch Sensor
  • Pneumatic Actuator
  • Easy to Service

Benefits

  • Low Cost Angle Valve
  • Extremely High Cycle Lift
  • Extremely Out-gassing Rate

Application Field

  • Etcher
  • CVD
  • Implanter
  • Sputter
  • All Vacuum System, ETC

Technical Data

1 Pressure range <5 x E-8 Torr ~ atm
2 Leak rate <5 x E-8 Torr ~ atm
3 Temperature
- Body
- Actuator
- Position Indicator

< 150℃
< 100℃
< 80℃
4 Operation Double Acting
5 Closing Time < 1sec
6 Air Pressure 60~100psi (4.1~6.9 bar)
7 Air Connection Internal Threads M5
8 Reliability 300,000 Cycle
9 Surface treatment Bare
10 Weight 0.4kg